In this paper, challenges of true-3D nanometrology are discussed on four fundamental aspects: probing sensor, measurement strategy, tip geometry and structure/tip deformation. Our research progress addressing these challenges is introduced.
10.22032/dbt.58681 Zitier-Link kopieren
DOI (10.22032/dbt.58681)
https://doi.org/10.22032/dbt.58681
URN (urn:nbn:de:gbv:ilm1-2023isc-095:8)
https://nbn-resolving.org/urn:nbn:de:gbv:ilm1-2023isc-095:8
Nutzung und Vervielfältigung: