Study of the effect of matting agents on the measurability of geometrical objects

Optical metrology has witnessed remarkable advancements over the past few years and
increased its applications in many different fields. This study focuses on the effects while using a form of matting to reduce reflective effects to improve the measurements. However,
challenges such as surface reflections and illumination issues must be addressed to ensure errorfree measurements. Both the effectiveness of these surface treatments and the associated deviation of the values get investigated. In addition, data from three measurement devices are used to obtain the required values with state-of-the-art accuracy. The experimental analysis of the effectiveness of the different matting methods takes at least 13 distinct methods and products into account.