Dynamic sensor positioning in large measuring volumes by an inverse kinematic concept

The growth in measuring objects and the demand for measurement precision in the sub-nanometer range are the challenges for future nano positioning and nano measuring machines (NPMMs). However, the usual moving stage principle will reach its limits due to the larger moving masses it entails for large measuring volumes. Therefore, an inverse kinematic concept for NPMMs is proposed, which permits to reduce the moving masses to a few kilogram. In this concept, the interferometers and the probe are moved, while the measuring object and the interferometer mirrors are fixed. The probe position is measured and controlled in 6 DOF.